Excimer laser is a high-power output deep ultraviolet (DUV) laser source. This series of lasers adopts a magnetic assist excitation circuit design to extend the life of the thyristor. The pulse energy can reach up to 700mJ, and the built-in energy feedback system has good energy stability. It can be used for PLD, fine processing, material surface treatment, and laser annealing.
Excimer laser is a high-power output deep ultraviolet (DUV) laser source. This series of lasers adopts a magnetic assist excitation circuit design to extend the life of the thyristor. The pulse energy can reach up to 700mJ, and the built-in energy feedback system has good energy stability. It can be used for PLD, fine processing, material surface treatment, and laser annealing.
| Parameter | Value | ||
|---|---|---|---|
| Medium Gas | / | ||
| ArF | KrF | ||
| Wavelength | / | 193 nm | 248 nm |
| Max. Single Pulse Energy | PLD30 | 200 mJ | 500 mJ |
| PLD20 | 300 mJ | 600 mJ | |
| PLD20L | 400 mJ | 750 mJ | |
| Average Power | PLD30 | 5 W | 14 W |
| PLD20 | 5 W | 11 W | |
| PLD20L | 7 W | 13 W | |
| Max. Repetition Rate | PLD30 | 30 Hz | |
| PLD20 | 20 Hz | ||
| PLD20L | |||
| Beam Size (V*H) | PLD30 | 24*8 mm | |
| PLD20 | |||
| PLD20L | |||
| Energy Stability (σ%) | 1 (@ 248 nm) | ||